# Optical constants for silicon-germanium (20% Ge) by PTB # created 2023-05-30 07:52:52.873395 # Reconstructed from reflection measurements in the photon energy range 80 - 250 eV # n = (1-delta) - (i*beta) # # Citation: Ciesielski, R., Bogdanowicz, J., Loo, R., Shimura, Y., Mani, A., Mitterbauer, C., ... & Soltwisch, V. (2024). Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology, 23(4), 041405-041405. # # energy/eV, 1-delta, beta # ------------------------- 80.01 0.99078 0.00863 82.01 0.99226 0.00848 84.01 0.99349 0.00872 86.01 0.99445 0.00882 88.01 0.99533 0.00865 90.01 0.99635 0.00841 92.01 0.99754 0.00815 94.01 0.99895 0.00781 96.01 1.00037 0.0073 98.01 1.00325 0.0068 100.01 1.0127 0.01107 102.01 1.00071 0.01564 104.01 1.00273 0.01394 106.01 1.00444 0.01443 108.01 1.00348 0.01616 110.01 1.00308 0.01689 112.01 1.00268 0.01766 114.01 1.00247 0.01808 116.01 1.00218 0.01927 118.02 1.00129 0.02043 120.02 1.00013 0.02069 122.02 0.99964 0.02118 124.02 0.99837 0.02113 126.02 0.99761 0.02083 128.02 0.99683 0.02064 130.02 0.99617 0.02039 132.02 0.99527 0.02008 134.02 0.99444 0.0194 136.02 0.99396 0.01843 138.02 0.99393 0.01782 140.02 0.99388 0.01734 142.02 0.99373 0.01693 144.02 0.99379 0.01677 146.02 0.99358 0.01661 148.02 0.99332 0.0162 150.02 0.99329 0.01572 152.02 0.99323 0.01594 154.02 0.9927 0.01528 156.02 0.99289 0.0149 158.02 0.99293 0.01473 160.02 0.99277 0.01456 162.02 0.99264 0.01441 164.02 0.99241 0.01419 166.02 0.99216 0.01392 168.02 0.99196 0.01366 170.02 0.99163 0.01335 172.02 0.99139 0.01278 174.02 0.9913 0.01229 176.02 0.99138 0.01185 178.02 0.99155 0.01151 180.02 0.99166 0.01119 182.02 0.99175 0.01102 184.02 0.99179 0.01087 186.02 0.99182 0.01065 188.02 0.99181 0.01039 190.02 0.99178 0.01005 192.02 0.99179 0.00972 194.02 0.99185 0.00941 196.02 0.99187 0.00914 198.03 0.9919 0.00893 200.03 0.99197 0.00865 202.03 0.99206 0.00837 204.03 0.99215 0.00816 206.03 0.99224 0.00796 208.03 0.99235 0.00782 210.03 0.99244 0.00768 212.03 0.99251 0.00754 214.03 0.99255 0.00737 216.03 0.99258 0.00716 218.03 0.99263 0.00698 220.03 0.99268 0.00681 222.03 0.99273 0.00665 224.03 0.9928 0.00649 226.03 0.99286 0.00633 228.03 0.99291 0.00615 230.03 0.99298 0.00599 232.03 0.99304 0.00585 234.03 0.99314 0.00574 236.03 0.99321 0.00565 238.03 0.99328 0.00554 240.03 0.99333 0.00542 242.03 0.99338 0.00532 244.03 0.99345 0.00522 246.03 0.99351 0.00512 248.03 0.99357 0.00506 250.03 0.99362 0.00498