# Optical constants for silicon-germanium (40% Ge) by PTB # created 2023-05-30 07:52:52.873395 # Reconstructed from reflection measurements in the photon energy range 80 - 250 eV # n = (1-delta) - (i*beta) # # Citation: Ciesielski, R., Bogdanowicz, J., Loo, R., Shimura, Y., Mani, A., Mitterbauer, C., ... & Soltwisch, V. (2024). Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy. Journal of Micro/Nanopatterning, Materials, and Metrology, 23(4), 041405-041405. # # energy/eV, 1-delta, beta # ------------------------- 80.01 0.99126 0.01673 82.01 0.99249 0.01678 84.01 0.99293 0.01699 86.01 0.99344 0.01695 88.01 0.99391 0.01669 90.01 0.99465 0.01634 92.01 0.99536 0.01578 94.01 0.99634 0.01527 96.01 0.99682 0.01393 98.01 0.99907 0.01294 100.01 1.00822 0.0148 102.01 0.99577 0.01911 104.01 0.99919 0.01833 106.01 0.99921 0.01656 108.01 0.99842 0.01767 110.01 0.99794 0.01918 112.01 0.99794 0.01918 114.01 0.9978 0.01894 116.01 0.99758 0.01971 118.02 0.99736 0.02072 120.02 0.99697 0.02128 122.02 0.99737 0.02256 124.02 0.99585 0.02263 126.02 0.99531 0.02206 128.02 0.99461 0.02177 130.02 0.9941 0.02137 132.02 0.99353 0.02086 134.02 0.99301 0.02012 136.02 0.99229 0.0194 138.02 0.99169 0.01877 140.02 0.99156 0.01824 142.02 0.99131 0.01786 144.02 0.99154 0.0178 146.02 0.99171 0.01771 148.02 0.99169 0.01723 150.02 0.99178 0.01667 152.02 0.9918 0.01693 154.02 0.99133 0.01631 156.02 0.99158 0.01635 158.02 0.99145 0.01595 160.02 0.9913 0.01564 162.02 0.99118 0.01524 164.02 0.99111 0.01468 166.02 0.99101 0.01412 168.02 0.99116 0.01378 170.02 0.99118 0.01354 172.02 0.99118 0.01313 174.02 0.99094 0.01303 176.02 0.99097 0.01285 178.02 0.99111 0.01256 180.02 0.99107 0.01237 182.02 0.99128 0.01246 184.02 0.99125 0.01249 186.02 0.99117 0.01221 188.02 0.99096 0.01193 190.02 0.991 0.01165 192.02 0.99103 0.01102 194.02 0.99086 0.01061 196.02 0.99085 0.0104 198.03 0.99092 0.01009 200.03 0.99098 0.00976 202.03 0.99105 0.00937 204.03 0.99109 0.0091 206.03 0.99118 0.0089 208.03 0.99128 0.00875 210.03 0.99142 0.00868 212.03 0.99153 0.00855 214.03 0.99157 0.00826 216.03 0.99163 0.00795 218.03 0.99158 0.00775 220.03 0.99168 0.00754 222.03 0.9918 0.00739 224.03 0.99188 0.00712 226.03 0.99194 0.00686 228.03 0.99209 0.00667 230.03 0.99213 0.00642 232.03 0.99223 0.00631 234.03 0.99236 0.00628 236.03 0.99243 0.00619 238.03 0.99251 0.00611 240.03 0.99258 0.00599 242.03 0.99267 0.00585 244.03 0.99268 0.0058 246.03 0.99275 0.00582 248.03 0.99279 0.00573 250.03 0.99275 0.00566